The systems smartWLI compact and smartWLI nanoscan can scan nano structures on larger areas with sub atomic height resolution and point densities down to 0.03 µm.

EPSI (Extended Phase Shift Interferometry) combines the advantages from VSI (Vertical Scanning Interferometry) - unlimited z range but lower height resolution – and PSI (Phase Shift Interferometry) extreme height resolution but to λ/2 half limited z range.

The smartWLI’s can be used easily for roughness measurements. The measurement of tracks from stylus tips demonstrate the advantage of optical touch free measurements.

Wear marks can be quickly measured with the smartWLI systems in high resolution. The high resolution reduces the test effort, since even small changes in the surface topography can be easily quantified.

Optimized algorithms allow the scanning of surfaces with a high aspect ratio – small structures with high inclined flanks. The high speed enables the user the survey of smallest details over large areas.

The smartWLI’s can measure larger areas with atomic height resolution.

The combined evaluation of geometry and surface structures of cutting edges is important to understand the cutting-edge preparation in detail and to optimize the production processes.

The sheet metal forming has high requirements on the micro structures as well as on the waviness of the raw material. Parameters as Wa with evaluation length of 50 mm and tolerances of parts from a micrometer require the combination of an fast scanning process with, an nm accuracy and a dedicated software with all necessary algorithms implemented.

 Determination of geometrical dimensions and critical surface parameters

Measurement of lateral distances and depths

Determination of roughness, flattness, texture and other functional surface parameters (DIN EN ISO)

Determination of groove depth, flatness and roughness parameters

Analysis of surface texture and geometry, detailed visual surface metrology reports (DIN EN ISO roughness, height and volume parameters, particle and grain analysis)

Analysis of solid particles (size, shape, statistics) in the cream surface

Measurement of coating thickness (height of a step between glas surface and coating surface)

Measurement of the curvature radius, measurement of surface waviness and roughness