Nanostructures

The systems smartWLI compact and smartWLI nanoscan can scan nano structures on larger areas with sub atomic height resolution and point densities down to 0.03 µm.

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spiral staircase

EPSI (Extended Phase Shift Interferometry) combines the advantages from VSI (Vertical Scanning Interferometry) - unlimited z range but lower height resolution – and PSI (Phase Shift Interferometry) extreme height resolution but to λ/2 half limited z range.

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Wear measurement

Wear marks can be quickly measured with the smartWLI systems in high resolution. The high resolution reduces the test effort, since even small changes in the surface topography can be easily quantified.

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Blasted surface

Optimized algorithms allow the scanning of surfaces with a high aspect ratio – small structures with high inclined flanks. The high speed enables the user the survey of smallest details over large areas.

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Measurement of cutting edges

The combined evaluation of geometry and surface structures of cutting edges is important to understand the cutting-edge preparation in detail and to optimize the production processes.

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Sheet metal surface measurements

The sheet metal forming has high requirements on the micro structures as well as on the waviness of the raw material. Parameters as Wa with evaluation length of 50 mm and tolerances of parts from a micrometer require the combination of an fast scanning process with, an nm accuracy and a dedicated software with all necessary algorithms implemented.

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