smartWLI technology
advantages of high performance measuring technologies
coherence scanning interferometer
interferometry objectives
interferences of white light
spectral optimization for noise reduction
HD-EPSI (high density-extended phase shift interferometry)
HD-EPSI and comparison to the profile averaging
profile averaging
comparison between HD-EPSI and the profile averaging
advantage of extreme fast prescans
advanced algorithms for steep surface features
samples for steep concave and convex surfaces
firebolt, 5x objective – 3d printed metal surface
acceleration using decimation
acceleration using ROIs (reduced areas of interest)
point density and optical lateral resolution
microscope image analysis compared to the 3d scanning
practical tests of the system resolution
comparison to tactile measurements
sampling theorem / optical resolution
scratches of an stylus instrument on an roughness standard
correct measurement of tracible roughness standards
smartSTITCH perfect scans of larger areas
