Page 8 - smartWLI technology
P. 8
3d structure resolution of the smartWLI‘s
Standard with line structures:
• 100x objective
• partial area of a 170 x 140 µm ²FOV
• configuration with 5 MP camera
• measuring point distance 0.07 µm
• on an 0.1 µm wide line structure the measured
height value got down to app. 2/3 of the nominal
value
3D Siemens-Stern:
The result of the 20x objective
proves the correct scan of the
3d structures compared to the
100x reference file down to the
single points without influence
of the direct neighborhood and
similar height resolution.
100x objective (partial area) 20x objective (partial area)
