Page 11 - smartWLI technology

measuring of surface roughness standards

µm nm
2 100
1 50
0 0
-1 -50
-2 -100
nm
µm
2 100
0
0
-100
-2
0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 1.2 1.3 mm
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 mm
Ra Rz Rmax Ra Rz Rmax
0.949 µm 3.013 µm 3.025 µm 24.109 nm 128.972 nm 139.524 nm

0.960 µm ± 0.030 µm 3.010 µm ± 0.090 µm 3.020 µm ± 0.090 µm 24.100 nm ± 2.500 nm 128.400 nm ± 15.000 nm 156.700 nm ± 25.000 nm

µm
1.0
measurement of surface roughness:
0.5
•
0.0 evaluation according ISO standards
• 50x objective
-0.5
-1.0
• configuration with 2.3 MP camera and
µm subsampling
2
1 • measuring point density 0.48 µm
0
-1 • measuring of a 5.6 mm length in 30 s
• evaluation of several 100 profiles
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 mm
• automatically compensation of the stylus tip

geometry
Ra Rz Rmax
0.208 µm 1.496 µm 1.619 µm

0.200 µm ± 0.018 µm 1.490 µm ± 0.130 µm 1.630 µm ± 0.150 µm