Page 7 - smartWLI technology
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very high structure resolution











                                                                                                         White-light interferometry
                                                                                                            use only pictures with
                           flash                                                                          highest sharpness for the
         pictures for 3d calculation
                                                                                                            calculation of 3d data.
                                                          white-light interferometry  sharpness          have to use images out of a

                                                                                                          Inherent to the functional
                                                                                                           principle focus variation
                  optimized  focus                               focus variation / confocal microscopy    larger z range and starting
                                                                                                           and confocal microcopy





                                                                                                                    blurring.


                                                                                                          Out of this reason white-
                                                                                                          light interferometry has a
                                                                                                         better structure resolution
                                                                                                           if similar objectives with
                                                                                                           identically aperture are
                                                                                                                     used.
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