Page 12 - smartWLI technology
P. 12
measurement of step standards
µm
100
80
60
40
20
0
measuring of step heights:
Step standards could be very precise
produced and with a very low
uncertainty tracible certificated.
Gauge R&R tests on step standards can
be used to prove the perfect
movement of the interference
objective as well as synchronization
with the frame grabbing and poove
the absolute accuracy of the systems.
