Page 6 - smartWLI technology
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best hight resolution for all objectives








                                                           system noise / nm






















                                                                                                                     focus variation


                                                                                                              confocal microscopy


                                                                                                      white-light interferometry

                100x                   50x                   20x                    10x



      advantage of the white-light interferometry:

      The white-light interferometry offers the best height resolution for all objectives and is superior  to competitive
      measuring principles as confocal microscopy and focus variation.
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