Page 9 - smartWLI cutting tools
P. 9

application which requires sub nanometer resolution: crystal defects








































                 original result                              form filtered result                     form- and waviness filtered




                         scan: 10x objective – single scan, scanning time 0.5s (no profile averaging)


        the smartWLI technology provides the resolution to scan and evaluate crystal defects with an height of
                                                            single atom layers
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