Page 4 - smartWLI cutting tools
P. 4

selection of the best objective for the scanning of tool edges








                                              high speed camera 1900 x 1200 pixel / 170 Hz
          Scanning Speed                                        up to 250 µm/s – full camera resolution

             Magnification           2.5x               5x               10x               20x                50x              100x

                FOV / mm²         7.3 x 4.6          3.7 x 2.3         1.8 x 1.2       0.91 x 0.58        0.37 x 0.23       0.18 x 0.12

              Spacing / µm           3.8               1.9               0.96              0.48              0.19               0.1

                  WD / mm            10.3              9.3                7.4               4.7               3.4                2


                                               high resolution camera 2456 x 2054 / 86 Hz

       Scanning Speed                                           up to 120 µm/s – full camera resolution

          Magnification              2.5x               5x               10x               20x                50x              100x

              FOV / mm²           6.8 x 5.7          3.4 x 2.8         1.7 x 1.4       0.85 x 0.71        0.34 x 0.28       0.17 x 0.14

           Spacing / µm              2.8               1.4               0.69              0.35              0.14              0.07

                WD / mm              10.3              9.3                7.4               4.7               3.4                2


      Compromise out of best resolution, max. field of view and data quality on sloped areas
      •    all the objectives provide the necessary height resolution

      •    20x is suitable for edges with moderate radius of 5 µm and larger with an min. angle of app. 90°
      •    50x is suitable for most edges starting of app. 2.5 µm radius and an min. angle of app. 60°
      •    100x is necessary for polished and coated tools with sharp edges
   1   2   3   4   5   6   7   8   9