Page 10 - smartWLI cutting tools
P. 10

optical resolution and measuring point density






                                                         the optical resolution is defined to the drop of the light
                                                         intensity to 73.5 % between the light spots
                             flash                       •    the white-light interferometry needs much less intensity
                                                              differences
                                                         •    compared to competitive technologies it isn’t restricted to:
                                                                 o   focus variation: the best contrast is calculated out of
                                                                     many points which rounds the structures
                                                                 o   confocal microscopy: hole densities of the Nipkow
                                                                     slice, seize of laser spots and density and sharpness

                                                                     of projected patterns are reducing the xy resolution,
                                                                     camera with exceeding pixel densities doesn’t improve
                                                                     the xy structure resolution






                                                                    xy measuring point densities smartWLI
                                                                               prime/compact/extended

                                           objektiv         2.5x           5x           10x           20x          50x          100x


         measuring point distance / µm                      1.20           0.7         0.30          0.23          0.16          0.13

                           2 MP camera  / µm                 3.7           1.9          0.9          0.47          0.19          0.09


                            5 MP camera / µm                 2.2           1.1         0.55          0.27          0.11          0.05
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