Page 10 - smartWLI cutting tools
P. 10
optical resolution and measuring point density
the optical resolution is defined to the drop of the light
intensity to 73.5 % between the light spots
flash • the white-light interferometry needs much less intensity
differences
• compared to competitive technologies it isn’t restricted to:
o focus variation: the best contrast is calculated out of
many points which rounds the structures
o confocal microscopy: hole densities of the Nipkow
slice, seize of laser spots and density and sharpness
of projected patterns are reducing the xy resolution,
camera with exceeding pixel densities doesn’t improve
the xy structure resolution
xy measuring point densities smartWLI
prime/compact/extended
objektiv 2.5x 5x 10x 20x 50x 100x
measuring point distance / µm 1.20 0.7 0.30 0.23 0.16 0.13
2 MP camera / µm 3.7 1.9 0.9 0.47 0.19 0.09
5 MP camera / µm 2.2 1.1 0.55 0.27 0.11 0.05