Page 6 - Cylinderinspector 3D
P. 6
Superior measuring principle - smartWLI
height resolution / nm
focus variation
confocal microscopy
white-light interferometry
100x 50x 20x 10x
white-light interferometry provides best height resolution
and extreme point densities in lateral direction without the limitation of hole densities in
the Nipkow (confocal microscopy) disc or the seize of the correlation matrix (focus
variation)
Ra = 25 nm
