Page 10 - Cylinderinspector 3D

“Closed-” and “Cross-” structures

sample 1 sample 2 “cross structures” are

structures defined which
are running not in the
honing directions

“closed structures” are not
directional structures

sample 1 shows a
significant higher
percentage of rising

„cross structures“ structures compared to
nm the falling structures
1000 nm
1000
800
800
600
600 sample 2 shows a
400
400 scratches identified as
200
200 „closed structures“
0 “cross structures” and a
0 20 40 60 80 100 120 140 160 ° 0
very high level of non
0 20 40 60 80 100 120 140 160 °
Parameters Value Unit Parameters Value Unit directional “closed
Honing Angle - Honing Structure FFT Analysis 24 ° Honing Angle - Honing Structure FFT Analysis 13 °
Rising Grooves - Honing Structure FFT Analysis 21 ° Rising Grooves - Honing Structure FFT Analysis 12 ° structures”
Falling Grooves - Honing Structure FFT Analysis 27 ° Falling Grooves - Honing Structure FFT Analysis 14 °
Rising Structures - Honing Structure FFT Analysis 36 % Rising Structures - Honing Structure FFT Analysis 14 %
Falling Structures - Honing Structure FFT Analysis 26 % Falling Structures - Honing Structure FFT Analysis 12 %
Cross Structures - Honing Structure FFT Analysis 1.7 % Cross Structures - Honing Structure FFT Analysis 5.9 %
Closed Structures - Honing Structure FFT Analysis 36 % Closed Structures - Honing Structure FFT Analysis 67 %

Ra = 25 nm