Page 2 - Cylinderinspector 3D
P. 2
General specifications
smartWLI Cylinderinspector 3D
cylinder diameter 70 ... 125 mm (standard configuration)
standard insertion cylinder depth to app. 188 mm
extended range insertion cylinder depth to app. 270 mm
motorized insertion system cylinder depth to app. 200 mm / stitching
measurement technique white-light interferometry
height resolution / nm 1 nm (all objectives / field of views)
scanner Precision piezo drive with gauge control
scan range 200 µm
speed up to app. 50 µm/s – full resolution
system software smartVIS 3D / Speedytec on GPU
evaluation software MountainsMap with GBS programmed extensions
camera 2000 x 2000 measuring points
weight app. 12 ... 14 kg
power supply 100 to 240 VAC, 50/60 Hz
Ra = 25 nm
