smartWLI GBScanner

 GBScanner 3d profiler for fast and reliable roughness measurements

The smartWLI GBScanner is a fast optical profiler with sub nanometer topography reproducibility. By using a motorized 3-axis tripod for scanning and positioning with a measuring volume of 100 x 100 x 50 mm³ (xyz) an extension up to 300 x 300 x 100 mm², the system can be used for the measurement of medium seize samples. The 3d data will be evaluated in MountainsMap and allows automated push button scan and data evaluations using customized evaluation macros.

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Using coherence scanning (white-light) interferometry to measure roughness and micro geometries

Coherence scanning (white-light) interferometry provide a much higher resolution than competitive optical 3d measuring principles as confocal microscopy, focus variation, chromatic confocal sensors, fringe projection or laser triangulation sensors. As microscopical optical measuring principle the GBScanner can be configurated using interference objectives with magnification from 2.5x up to 115x. Structures starting from lateral seize of app. 0.3 µm can be resolved. The upper limit is several mm² for single scans and several cm² for stitched areas.

 

Advantages of smartWLI sensors and optical profilers compared to other coherence scanning (white-light) interferometer

High speed cameras combined with massive parallel data processing allows to accelerate the data acquisition and evaluation processes and make the systems robust and less sensitive against vibrations. The acceleration enables data acquisition and stitching of several 100 single scans with typical cycle times of 1…3 seconds per single scan. The data processing including contrast enhancement, model-based signal correction and data quality surveillance enables to pick up weak signals on high sloped areas.

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Direct contact to our Team:

EMail: sales@gbs-ilmenau.de
Phone: +49 3677 83710 54