Page 6 - smartWLI technology

simplified scanning and data evaluation

nm
Context Mean Std dev Min Max
100 nm 0 20 40 60 80 100 %
ISO 4287 0
Amplitude parameters - Roughness profile -100 95.6
0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 mm
Rp µm Robust Gaussian filter, 0… 0.78591 0.32770 0.33159 1.7960 75.7
Parameters Value Unit
Rv µm Robust Gaussian filter, 0… 3.0747 2.7297 0.19155 14.527
R 120.34 nm 55.8
Rz µm Robust Gaussian filter, 0… 3.8606 2.8569 0.77300 15.539 AR 0.17199 mm
Rt µm Robust Gaussian filter, 0… 5.0938 2.9554 0.87310 15.982 Rx 195.90 nm 35.9
Pt 205.80 nm
Ra µm Robust Gaussian filter, 0… 0.31849 0.26933 0.11790 1.6515 16.0
Rq µm Robust Gaussian filter, 0… 0.58694 0.59424 0.14595 3.5006 -3.9
ISO 13565 -23.8
ISO 13565-2
Rk µm Robust Gaussian filter, 0… 0.48949 0.068848 0.34361 0.80884 -43.7
Rpk µm Robust Gaussian filter, 0… 0.28002 0.15549 0.095143 1.0265 -63.6
Rvk µm Robust Gaussian filter, 0… 1.8060 1.7260 0.10587 11.296 -83.5
0 5 10 %
Rpk
Rk
µm
100
Rvk
mm 90
0 10 20 30 40 50 60 70 80 90 100 % 1 80
Mr1 Mr2 1.0
70
Information 2
Filter settings Double Gaussian filter, 0.25000 mm. 60
Parameters Value Unit
Rk 77.343 nm 0.5 50
Rpk 22.799 nm
Rvk 31.628 nm 40
Mr1 11.090 % 1
Mr2 87.030 % 30
A1 1264242 nm²/mm
A2 2051042 nm²/mm 0.0 20
Rpk* 40.196 nm
Rvk* 56.461 nm 0.0 0.5 1.0 1.5 mm 10
0
µm
5 Differential parameters P2 - P1 Unit
Zmean(higher) - Zmean(lower) 100.08 µm
µm 1 Angle difference 0.0055671 °
0
100
Plane parameters Unit Plane 1 …
-5
50 Zmin µm 0.0000 …
ZMean µm 0.93520 …
-10 0
Zmax µm 1.4405 …
-50
-15
-20 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1.1 mm
0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 mm
Parameters Step 1 Unit
Information Mean height 100.07 µm
Profile honing with cavities > Mirrored (in Z) > Filtered (Median Denoising 5x5) > Resampled (812 points x 617 line…
T-axis Y-axis = -0.54878 mm
Parameters Value Unit
Length 1.4447 mm
Ra = 25 nm