Page 4 - smartWLI technology
P. 4
smartWLI compact
400 µm piezo scanner
0.1 nm z - resolution available objectives:
5x; 10x; 20x; 50x; 100x
5000 µm scanner
10 nm z - resolution
fast 2.3 camera:
1900 x 1200 pixel - 170 f/s
950 x 600 pixel – 500 f/s
up to 3 kf/s (ROI)
high resolution 5 MP:
2456 x 2054 pixel – 86 f/s
up to 2 kf/s (ROI)
SDK for sensor implementation:
libraries for complete sensor control
C++ or C#
3d sensors for inline application
Ra = 25 nm