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smartWLI compact






    400 µm piezo scanner

     0.1 nm z - resolution                                                    available objectives:
                                                                                     5x; 10x; 20x; 50x; 100x


                                       5000 µm scanner
                                     10 nm z - resolution
                                                                              fast 2.3 camera:

                                                                                     1900 x 1200 pixel - 170 f/s
                                                                                     950 x 600 pixel – 500 f/s

                                                                                     up to 3 kf/s (ROI)




                                                                              high resolution 5 MP:
                                                                                     2456 x 2054 pixel – 86 f/s

                                                                                     up to 2 kf/s (ROI)






                                                                              SDK for sensor implementation:
                                                                                      libraries for complete sensor control

                                                                                      C++ or C#




             3d sensors for inline application



                                                                                                                                    Ra = 25 nm
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