Page 8 - smartWLI roughness
P. 8

compensation of the tip geometry
































             measured with smartWLI / 100x objective                              calculated profile after stylus tip compensation





                                                             The high resolution of the smartWLI system can cause significant
                                                               differences to the results measured with a stylus instrument.
                                                         The compensation of the tip geometry is necessary to get similar results
                                                          compared to measurements using stylus instruments. The evaluation
                                                          software MountainsMap® realizes the compensation of the stylus tip
                                                                                            geometry.
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