GBS mbH - Optische Messtechnik

GBS mbH - Optische Messtechnik

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spiral staircase

EPSI (Extended Phase Shift Interferometry) combines the advantages from VSI (Vertical Scanning Interferometry) - unlimited z range but lower height resolution – and PSI (Phase Shift Interferometry) extreme height resolution but to λ/2 half limited z range.

 Spiral

Measurement results as this spiral staircase demonstrate the unlimited z-rage…

 

Spiral

… combined with the sub nanometer height resolution.

 Spiral

Step heights near λ/2 would make the use of unwrapping algorithms impossible.

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Gesellschaft für Bild- und Signalverarbeitung (GBS) mbH

Robert-Bosch-Ring 8
98693 Ilmenau

Phone: +49 (0) 36 77- 83710-50
Email: info@gbs-ilmenau.de

 

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