Page 13 - smartWLI technology
P. 13
comparison: electron microscope - smartWLI
electron microscope image smartWLI – 3D Scan / 100x
camera image 100x objektive color coded 3D image/ partial area 3.5 x 2.3 µm²
electron microscope: high contrast on different materials in 2D
optical microscope: no details visible
smartWLI: fine details in 3D, no information about different
materials
Ra = 25 nm
