Page 2 - smartWLI roughness
P. 2
DIN EN ISO 25178-603/604
white-light interferometry/phase shift interferometry
are established measuring techniques for surface texture measurements according to DIN EN ISO 25178-603/604.
EPSI (extended phase shift interferometry) as the combination of both principles achieves the sub nanometer
resolution of the phase shift interferometry over an extended z range.
µm
4.82
0
-5.18
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 mm
Rpk
Spk
Rk
Sk
Svk
Rvk
0 20 40 60 80 100 % 0 20 40 60 80 100 %
Smr1 Smr2 Mr1 Mr2
Information Information
Filter settings Unfiltered. Filter settings Robust Gaussian filter, 0.800 mm, Manage end effects.
Parameters Value Unit Parameters Value Unit
Sk 2.66 µm Rk 2.53 µm
Spk 0.864 µm Rpk 0.984 µm
Svk 0.874 µm Rvk 0.840 µm
The measured 3d data can directly be used for the evaluation of 3D parameters. Alternatively, is it possible to select
single or multiple profile lines and calculate “classical” roughness parameters for evaluation analogous to stylus
instruments.
