Page 5 - smartWLI extended

general specifications

smartWLI prime

measurement technique white-light interferometry
scanning software smartVIS 3D

evaluation software MountainsMap with GBS programmed extensions

scanner precision piezo drive with gauge control
scan range up to 400 µm

speed full resolution 5.7 µm/s 5 MP camera / 11.3 µm/s 2.3 MP camera

max. scanning speed app. 400 µm/s

digitalization up to 0.01 pm (64 bit dynamically)
topography reproducibility < 0.1 nm*

1-σ reproducibility 0.4 µm step height < 1 nm

1-σ reproducibility 12 µm step height < 3 nm
1-σ reproducibility 100 µm step height < 20 nm

sensor weight app. 2 - 3 kg

humidity up to 95% relative, noncondensing

operation temperature 10 – 35°
power supply 100 to 240 VAC, 50/60 Hz

* Sq/√2 – profile difference of 2 scans, EPSI, single scan, without profile averaging, lab condition, 1 mio. points after 3x3 denoising filter

Ra = 25 nm