3D-Surface measurement

White light interferometry is one of the proven optical measurement methods for the acquisition of 3D topographs with depth resolutions in the lower nanometer range. Due to the parallel detection and processing of the measuring points, height information can be obtained over a large area and in a very short time.

  • The lens is moved by a piezo actuator in the z-axis. 
  • Interference patterns are also recorded on transparent samples and steep edges.
  • The interferencing effect results in a subnanometer resolution.
  • The position of the correlogram determines the absolute z position.
  • GBS's Speedytec technology uses FPGAs and GPUs to massively parallel image analysis and 3D computation in real-time.

Typical fields of application in quality assurance and research are the characterization of surfaces of different roughness (wafer structures, mirrors, glass, metals), the determination of step heights and the precise measurement of curved surfaces, e.g. Microlenses. With the product family smartWLI, we offer innovative solutions for the application of this measuring principle. The proven smartWLI software is used to control and evaluate the entire measuring process. The efficient, robust and highly accurate evaluation algorithms contained therein are the result of extensive research and experience in this field.